Ferroelectric Self-assembled PbTiO3 Perovskite Nanostructures onto (100)SrTiO3 Substrates from a Novel Microemulsion Aided Sol-Gel Preparation
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چکیده
As the dimension of the microelectronic devices keep shrinking there is a pressing need to increase the dielectric constant of the gate oxide. Fabrication of the gate oxide out of ferroelectric nanostructure provides a possible solution. However, new approaches to the fabrication of ferroelectric nanostructures onto substrates are needed before nanoscale ferroelectrics can be successfully integrated into functional microelectronic devices. An important challenge is that the Sol fabrication of these materials in organized arrangement of the nanostructures is reliable and very cost-effective. 200nm Fast Fourier Transform Nanoislands with a lateral dimension of ~45-50 nm and a height of ~15 nm
منابع مشابه
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تاریخ انتشار 2008